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Filling a void in real time characterization of thin films, Staib’s Real Time Element Monitoring System (rt-EMS) is a new and innovative processing technique to measure the elemental composition of the surface layers of thin film materials. Using a totally unconventional and innovative approach, rt-EMS collects the Auger signals during the growth process and provides elemental information, for light to heavy elements, in real time. A Growth Profile is continuously displayed and updated as changes occur in the elemental composition of the material surface. Not available through other techniques, this elemental information can be used for improved understanding of growth dynamics and material properties.